Schematic driven MEMS design

Authors: Mirco Meiners, Robert Bosch GmbH, DE; Ralf Sommer, IMMS - Institut für Mikroelektroni...; Helmut Gräb, Technische Universität München, DE

Abstract:

Abstract
Microelectromechanical systems are important components for so-called cyber-physical systems. If a seamless MEMS design methodology for monolithic and hybrid systems overcomes current tool and workflow discrepancies in MEMS and IC design flows, further capabilities can be made available. This paper gives an overview of requirements on and solution approaches for an integrated MEMS/ASIC design flow.

This paper appears in:
Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012 International Conference on
Date of Conference: 19-21 Sept. 2012
Author(s):
Meiners, M.
Automotive Electron., Robert Bosch GmbH, Reutlingen, Germany
Sommer, R. IMMS, Erfurt, Germany;  Graeb, H.   TU München, Germany
Page(s): 117 - 120
Product Type: Conference Publications

Publication Date: 2012-09-19

Location of Publication: SMACD 2012, International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012

Keywords: Automotive; Analogue/Mixed Signal Design; MEMS Design; Implementation; Verification; Research/Education