Authors: Axel Hald, Robert Bosch GmbH, DE; Johannes Seelhorst, Robert Bosch GmbH, DE; ; Jürgen Scheible, Hochschule Reutlingen, DE;
Zusammenfassung:
http://ieeexplore.ieee.org/document/7520719/
In contrast to IC design, MEMS design still lacks sophisticated component libraries. Therefore, the physical design of MEMS sensors is mostly done by simply drawing polygons. Hence, the sensor structure is only given as plain graphic data which hinders the identification and investigation of topology elements such as spring, anchor, mass and electrodes. In order to solve this problem, we present a rule-based recognition algorithm which identifies the architecture and the topology elements of a MEMS sensor. In addition to graphic data, the algorithm makes use of only a few marking layers, as well as net and technology information. Our approach enables RC-extraction with commercial field solvers and a subsequent synthesis of the sensor circuit. The mapping of the extracted RC-values to the topology elements of the sensor enables a detailed analysis and optimization of actual MEMS sensors.
Publication Date: 2016/06/27
Location of Publication: Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2016 13th International Conference on
Keywords: Analogue/Mixed Signal Design; MEMS Design
