The project aims at the development and demonstration of new technologies and design methods which enable a systematic design of robust, energy-efficient multi-sensor microsystems consisting of micromechanical and microelectronic sensor components, which can be manufactured cost-effectively in limited numbers for industrial applications. This shall enable also SMEs from the sensor technology sector to more quickly, safely and economically than up to now develop integrated multisensor systems for industry 4.0 applications in a common value chain with R&D service providers and semiconductor manufacturers.
Solution: Industrial technology offers and design methods will be worked out to enable the development of MEMS sensors and integrated multisensor electronics with special emphasis on robustness and energy efficiency and by qualified standard production processes. This includes improved methods for computer-aided design of MEMS sensors with foundry technology, the first making available of a particular foundry process design kits (PDK) for ultra-low-power CMOS mixed-signal ASICs and new mixed-signal IP components to increase the design and test efficiency for multi-sensor systems.
Dissemination: The project results will be used by the consortium for the development of future multi-sensor products and their integration into industrial 4.0-enabled systems. On the other hand, the multisensor design processes and IP solutions over foundry PDK, EDA tools and R&D service offerings resulting from Romulus
are provided publicly available to a wide range of users. Romulus is making an essential contribution to cover in the position paper of Silicon Germany for "importance of microelectronics for industry 4.0" referred to specific technology and research needs. This results in an extensive leverage the innovative strength of the German sensor industry results far beyond the project consortium.
